| 摘要 |
<p>PURPOSE:To construct an array-type thermopile having functions of detecting the size of an object, the moving direction of the object and the moving speed thereof by disposing a plurality of thermopiles in a line on the same insulating base. CONSTITUTION:A plurality of thin-film thermocouple element patterns 21 to 28 are provided by evaporation or sputtering on a base 1 formed of an insulating film. The thin-film thermocouple element patterns are disposed symmetrically mutually with respect to hollow holes 31 to 34. A heat sink board 30 is provided with a plurality of hollow holes 31 to 34 and these holes are set to be in such dimensions that the thermal contact parts of the thin-film thermocouple element patterns 21 to 28 are just disposed on them. In the thermal contact parts of the thermocouple patterns, infrared absorbing layers 51 to 54 are formed respectively with the respective insulating layers 41 to 44 interposed. Thermopile elements are constructed of these infrared absorbing layers and thin-film thermocouple patterns.</p> |
