| 摘要 |
PURPOSE:To obtain excellent testing conditions corresponding to the characteristics of items to be measured of IC chips by taking the characteristics into account by providing a plurality of electrode pads to each of a prescribed number of terminals of an integrated circuit and separately setting measurement lines in accordance with the characteristics, etc., of the items to be measured. CONSTITUTION:When, for example, probes 3 and 3a are respectively brought into contact with electrode pads 2 and 2a for taking out certain arbitrary circuit terminals and signals are sent to measuring systems 6 and 7 through signal cables 4 and 4a, a small and large currents are measured through the electrodes pads 2 and 2a of an IC chip 1. For measuring the small and large currents, the first measuring line provided with the probe 3 for measuring the small current with a small contact resistance, the signal cable 4a having a small stray capacity, and a measuring system A 6 which is small in current measuring range and resolution and the second measuring line provided with the probe 3a for measuring the large current which is less in deterioration at the end, the signal cable 4 having a large diameter, and a measuring system B 7 which is large in current measuring range are separately obtained. |
