| 摘要 |
PURPOSE:To enable temperature of a detector to be maintained to a constant value by providing a cooling control means, a temperature measuring means, a heating means, and a heating control means and then controlling temperature near the detector to a constant value. CONSTITUTION:Control temperature of a cooling control device 8 is set to a specified temperature range for performing interrupted operation of a cooling device 7 automatically, temperature is measured by a thermocouple 9 which is set near a detector 2, and current or voltage is supplied to a heater 11 which turns around a heat-conductive bar 3 so that temperature at the detection part becomes constant. With this configuration, temperature at the detection part is maintained to be constant while the cooling device is at halt, thus enabling fluctuation of noise or drift of spectrum of a semiconductor detection element 2a and its initial stage amplifier to be suppressed and accuracy of X-rays analysis to be improved.
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