发明名称 METHOD AND DEVICE FOR MEASURING REFLECTANCE
摘要 <p>PURPOSE:To make measurement of the refractive index with the beam dia. condensed still thinner by allowing the light emitted by a light source to be incident to the object to be measured in such a way as perpendicular thereto and focusing in the neighborhood thereof, and by separating the reflected beam from the incident beam. CONSTITUTION:A laser beam emitted by a laser device 1 is put incident to a specimen 6 with the optical axis arranged perpendicular thereto and is condensed by a lens 3 which is adjustable so as to focus in the neighborhood of the specimen 6. The reflected beam reflected by the specimen 6 and advancing oppositely on the light path identical to the incident beam is separated from the incident beam by a beam splitter 2, and a photo-receiving device 5 measures the intensity. Because the optical axes of the incident and reflected beams become identical in the neighborhood of the specimen 6, the incident beam can be condensed to servo measuring the refractive index in a minute region. The lens 4 is adjustable so as to maximize the photo-receiving amount of the device 5, and thereby the reflected beam is condensed at the device 5. Accordingly the measurement can be done with the beam dia. condensed thin, wherein a high space analyzing capability is provided.</p>
申请公布号 JPH04110755(A) 申请公布日期 1992.04.13
申请号 JP19900230220 申请日期 1990.08.31
申请人 SUMITOMO ELECTRIC IND LTD 发明人 SEMURA SHIGERU
分类号 G01N21/55;G01M11/00 主分类号 G01N21/55
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