发明名称 |
AUS DER GASPHASE HERGESTELLTER DIAMANT, SOWIE VERFAHREN ZU DESSEN HERSTELLUNG. |
摘要 |
The present invention relates to gaseous phase synthesized diamond and a method for synthesizing the same. In order to obtain crystalline diamond having remarkably high completeness and hardly containing carbon having a construction other than that of diamond, raw material gases are thermally activated by a thermoelectron-radiating material heated at an extremely high temperature, the thermoelectron-radiating material being connected to a negative pole while a substrate to be coated is connected to a positive pole, by the use of a direct current power source. A plasma is formed between the thermoelectron-radiating material and the substrate by applying a direct current voltage, and a diamond film having an average particle size of 2 microns or less, compression residual stress and electric resistance of 10<8> ohm.cm or more is formed on the substrate by using the activation by the thermoelectron-radiating material together with the activation by the formation of DC plasma. In addition, homogeneous diamond particles uniform in shape can be obtained by using this method. |
申请公布号 |
DE3777000(D1) |
申请公布日期 |
1992.04.09 |
申请号 |
DE19873777000 |
申请日期 |
1987.07.23 |
申请人 |
SUMITOMO ELECTRIC INDUSTRIES, LTD., OSAKA, JP |
发明人 |
IKEGAYA, AKIHIKO ITAMI WORKS;TOBIOKA, MASAAKI ITAMI WORKS, ITAMI-SHI HYOGO, JP |
分类号 |
C30B25/02 |
主分类号 |
C30B25/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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