发明名称 RESIN-MOLDING DIE
摘要 PURPOSE:To simplify a process of cleaning a molding die by applying acid- resistant coating to surfaces to be in contact with molding resin. CONSTITUTION:An upper base block 1, a lower base block 2, an upper center block 3, a lower center block 4, an upper chase block 5, and a lower chase block 6 are all made of iron. The upper center block 3, the lower center block 4, the upper chase block 5, and the lower chase block 6 are coated with acid- resistant polysilicon 11 in the areas to be in contact with molding resin. The polysilicon 11 may be deposited by CVD, evaporation, or sputtering. The polysilicon coating enables the use of a strong acid such as sulfuric acid or chloric acid that is very effective to clean the surfaces to be in contact with molding resin.
申请公布号 JPH04107935(A) 申请公布日期 1992.04.09
申请号 JP19900227218 申请日期 1990.08.28
申请人 FUJITSU LTD;KIYUUSHIYUU FUJITSUU EREKUTORONIKUSU:KK 发明人 SASAKA MASAAKI
分类号 H01L21/56;B29C45/26;B29C45/37;B29L31/34 主分类号 H01L21/56
代理机构 代理人
主权项
地址