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发明名称
HALBLEITEREINRICHTUNG UND VERFAHREN ZUR HERSTELLUNG DERSELBEN
摘要
申请公布号
DE4126766(A1)
申请公布日期
1992.04.09
申请号
DE19914126766
申请日期
1991.08.13
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
KOSAKI, KATSUYA, ITAMI, HYOGO, JP
分类号
H01L23/12;H01L23/36;H01L23/373;H01L23/538;H01L23/66
主分类号
H01L23/12
代理机构
代理人
主权项
地址
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