| 摘要 |
<p>PURPOSE:To almost eliminate warpage even when shrinkage at the time of baking is different and to stably detect pressure by laminating thick film bodies to both surfaces of a fixing stand to integrally mold the same. CONSTITUTION:At first, alpha-Al2O3(purity : 99%) is subjected to wet grinding until 80% or more thereof becomes a particle size of 2.5mum or below. After drying, an org. binder is added to the obtained powder and, after degreasing, the resulting mixture is cast by a doctor blade method. Subsequently, in order to control baking shrinkage, a mixture wherein a grinding time is altered or a mixture reduced in the amount of the binder by applying temporary baking to the ground powder is also cast. An electrode having a predetermined shape is formed in 20mum thickness from paste based on Pt and containing the org. binder and 10% of the powder subjected to wet grinding by screen printing. Further, a solvent is added to carbon black and the resulting mixture is printed in predetermined thickness to obtain an interposing body. Next, thick film bodies 2, 3 are integrally laminated to a fixing stand 1. After a resin is removed, the whole is baked at 1,520 deg.C for 2hr.</p> |
