发明名称 Method of making a piezoelectric actuator.
摘要 To make a piezoelectric actuator, unfired films (41) for a piezoceramic are stacked, supporting structures (44) made of a material which sets at the firing temperature of the piezoceramic and filling structures (42) made of a material which incinerates at the firing temperature being produced between every two unfired films (41). After the piezoceramic has been fired, cavities produced by the filling structures (42) being burnt out are filled with conductive material. <IMAGE>
申请公布号 EP0478998(A2) 申请公布日期 1992.04.08
申请号 EP19910115293 申请日期 1991.09.10
申请人 SIEMENS AKTIENGESELLSCHAFT 发明人 MOHAUPT, JUTTA;LUBITZ, KARL, DR.;SCHNOELLER, MANFRED, DR.;WERSING, WOLFRAM, DIPL.-PHYS.
分类号 H01L41/083;H01L41/293 主分类号 H01L41/083
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