APPARATUS FOR ION-PLASMA MACHINING WORKPIECE SURFACES,申请号EP19910105591-传众专利搜索

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发明名称	APPARATUS FOR ION-PLASMA MACHINING WORKPIECE SURFACES
摘要
申请公布号	EP0463303(A3)	申请公布日期	1992.04.08
申请号	EP19910105591	申请日期	1991.04.09
申请人	HAUZER HOLDING B.V.	发明人	VLADIMIROVICH, DANYSH SERGEY;NICKOLAEVICH, LOBANOV ALEXEY;VLADIMIROVICH, OBUKHOV ANDREY;ALEXEEVICH, OBUKHOV VLADIMIR
分类号	H01J37/08;C23C14/46;H01J37/30;H01J37/305;H01J37/317;(IPC1-7):H01J37/30;H01J37/32	主分类号	H01J37/08
代理机构		代理人
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