DISCHARGE-EXCITED EXCIMER LASER DEVICE

摘要

PURPOSE:To obtain an excimer laser device capable of high efficiency oscillation by a method wherein at least two preionized discharge gaps are connected in series to be arranged so that the positions in the excited discharging direction may be fluctuated in the laser beam direction. CONSTITUTION:Four preionized discharge gaps are connected in series to one peaking capacitor 2. The positions of the four preionized discharge gaps in the excited discharge direction are slightly spipped to be arranged so that the positions may be periodically fluctuated when seen in the whole long direction of an excited discharge electrode 5.