| 摘要 |
An X-ray detector, which is concerned with X-rays having wavelengths of less than 100 ANGSTROM , includes an X-ray filter with a thickness smaller than a previously defined value, a semiconductor light-receiving element arranged behind the X-ray filter, and a measuring device for measuring an output produced by the semiconductor light-receiving element. This detector is provided with a grazing incidence mirror in front of the X-ray filter so that the wavelength selection and intensity measurement can be effected simultaneously. The X-ray detector has important advantages in practical use that the power source system does not come to a large scale, its periphery circuit is simple, and sensitivity is as high as one to two orders than that of a conventional X-ray diode.
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