发明名称 PASTE COATER
摘要 PURPOSE:To obtain an equipment capable of coating paste without changing a nozzle even when the kind of article is changed, by installing a nozzle equipped with one or more spouting ports, and a driving means which relatively moves the nozzle and a lead frame and uniformly spreads the paste on a paste coating region. CONSTITUTION:The title paste coater spreads paste on a lead frame 4 in order to fix an electronic parts, and is equipped with the following; a nozzle 5 having at least one paste spouting port, and a driving means which relatively moves the nozzle 5 and a lead frame 4, and uniformly spreads paste 10 on a paste coating region. For example, a single-hole nozzle 5 having one spounting port is used, and made to move in the X direction and the Y direction by an X-Y table 6. The single-hole nozzle 5 is installed on one end of an arm 7. Between the other end of the arm and the X-Y table, a vertical movement unit 8 is installed. A paste spouting unit 9 is connected with the single-hole nozzle 5, and the paste is spouted intermittently or continuously.
申请公布号 JPH04105332(A) 申请公布日期 1992.04.07
申请号 JP19900221345 申请日期 1990.08.24
申请人 HITACHI LTD;HITACHI TOKYO ELECTRON CO LTD 发明人 SASAKI KAZUHIKO;ONODERA ATSUSHI
分类号 H01L21/52 主分类号 H01L21/52
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