Laser processing method and apparatus

摘要

With a laser processing apparatus, the membrane of a membrane-covered film is accurately processed with a scanning laser beam linearly both in the direction of conveyance of the film and in a widthwise direction forming an angle with the direction of conveyance simultaneously, and particles splashed or scattered from the membrane by application of the laser beam are positively removed for protection of the film and the laser beam applying heads. A method of applying a scanning laser beam to a workpiece to be processed where the scanning beam is so formed that the portion of the workpiece which is processed with it shows a smooth boundary in the direction of processing.