| 摘要 |
PURPOSE:To provide a gas sensitive element capable of being constructed in a small size and light weight, operating at normal temp., and shortening the time of recovery after sensing and reacting, by forming a Pt and Pt black electrode layer on the insulative layer of the gate part of an FET, and forming thereover a ceramic layer. CONSTITUTION:When a bias voltage is impressed on a gate and this is confronted to a gas to be inspected, molecules of this gas are adsorbed by a Pt black layer 1a and ionized, which acts so as to sink the gate voltage to the negative side, and thereby the current between source and drain will decrease. After sensing the gas and reacting, the far-infrared rays emitted by a ceramic layer 1b acts to vibrate oxygen molecules or ozone particles adsorbed by the Pt black layer 1a, which accelerates separation of these molecules from the layer 1a, and recovery as a sensor can be quickened. |
