| 摘要 |
PURPOSE:To obtain the subject thin film, composed of a halogenated carbon skeleton having radicals stable in the air and conjugated pi bonds at a high density, excellent in sensitivity and environmental resistance and useful for measuring, etc., environmental pollutants. CONSTITUTION:The objective thin film which is a molecular sensor thin film (having preferably about 380nm film thickness), capable of adsorbing molecules on, e.g. the surface of a substrate such as rock crystal and discriminating the adsorbed molecules and composed of a halogenated carbon skeleton such as polytetrafluoroethylene having radicals stable in the air and conjugated pi bonds at a high density. Furthermore, a halogen-containing polymer is used as a sputtering target to afford the thin film according to high-frequency sputtering. |
