| 摘要 |
PURPOSE:To stabilize the optical axis and the light quantity by modulating a laser light from two different directions and changing the optical axis direction of the laser light. CONSTITUTION:When the advance direction of an ultrasonic wave of a first A/O modulator 3a is set as the X axis direction,a nd the advance direction of an ultrasonic wave of a second A/O modulator 3b is set as the Z axis direction, a first A/O modulator 3a controls the optical axis direction and the light quantity of a laser light from the X axis direction, and a second A/O modulator 3b controls the optical axis direction and the light quantity of the laser light from the Z axis direction. That is, a result of detection of a four-split photodiode is fed back to the A/O modulators 3a, 3b, and by utilizing a deflecting function of the A/O modulators 3a, 3b, the two-axis control of the X axis direction of the Z axis direction is executed and the optical axis can be stabilized. In such a way, both of the optical axis and the light quantity of the laser light can be stabilized with high accuracy. |
