发明名称 JIG FOR GLASS MASK
摘要 PURPOSE:To safely and easily move a glass mask by using a vacuum chuck type glass mask jig in the case of moving the glass mask. CONSTITUTION:A vacuum tube is shown by 1, a valve is shown by 2, a knob part is shown by 3 and a glass mask holding part is shown by 4. A hinge for connecting the knob part 3 with the holding part 4 is shown by 6, and the knob part 3 can be moved back and forth with reference to the holding part 4 by use fo the hinge. By having such a constitution, it becomes unnecessary to always keep the knob part 3 standing in parallel to the glass mask when the holding part is inserted in the glass mask, so that an operator can easily operate it at the time of operating. A vacuum hole for holding the glass mask is shown by 7, and the hole for sucking the glass when the glass mask is actually held by the vacuum is shown by 8. Thus, the glass mask can be safely and easily moved by having such a constitution.
申请公布号 JPH04104156(A) 申请公布日期 1992.04.06
申请号 JP19900221935 申请日期 1990.08.23
申请人 SEIKO EPSON CORP 发明人 IRIKURA HIDEAKI
分类号 G03F1/00;G03F1/50;G03F7/20;H01L21/027;H01L21/677 主分类号 G03F1/00
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