| 摘要 |
<p>PURPOSE:To prevent deterioration of transparency with the lapse of time by using a copolymer of tetrafluoroethylene and a specified F-containing monomer. CONSTITUTION:The copolymer of the tetrafluoroethylene and the monomer having a cyclic perfluoroether group is dissolved in an F-containing solvent to form 3 - 10% concentration, and a film is formed by a solution casting method using this solution by a spin coater, a knife coater, or the like. It is preferred to form a film thickness of 0.5 - 10mum, especially, 0.8 - 5mum, thus permitting an exposure time to be reduced, and the pellicle film strength to be enhanced by thickening the film.</p> |
