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发明名称
VACUUM GENERATING DEVICE
摘要
申请公布号
JPH04103900(A)
申请公布日期
1992.04.06
申请号
JP19900221897
申请日期
1990.08.23
申请人
SMC CORP
发明人
NAGAI SHIGEKAZU
分类号
F04F5/20;F04F5/44
主分类号
F04F5/20
代理机构
代理人
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地址
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