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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH04103152(A)
申请公布日期
1992.04.06
申请号
JP19900222222
申请日期
1990.08.22
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD;HITACHI YONEZAWA ELECTRON CO LTD
发明人
ONO TOSHIAKI;KANEKO YASUO;ITABASHI HIRONOBU
分类号
H01L23/14;H01L21/60;H01L23/50
主分类号
H01L23/14
代理机构
代理人
主权项
地址
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