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发明名称
GRATING STRUCTURE
摘要
申请公布号
JPH04102643(A)
申请公布日期
1992.04.03
申请号
JP19900058064
申请日期
1990.03.12
申请人
DOKOO:KK
发明人
FURUSAWA KOICHI
分类号
E03F5/06;G09F13/20;G09F13/22
主分类号
E03F5/06
代理机构
代理人
主权项
地址
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