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发明名称
DIFFUSION APPARATUS
摘要
申请公布号
JPH04102325(A)
申请公布日期
1992.04.03
申请号
JP19900220286
申请日期
1990.08.22
申请人
NEC KYUSHU LTD
发明人
KAMAIKE HIROKO
分类号
H01L21/302;H01L21/31
主分类号
H01L21/302
代理机构
代理人
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