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发明名称
ACCELERATION SENSOR AND ITS MANUFACTURE
摘要
申请公布号
JPH04102066(A)
申请公布日期
1992.04.03
申请号
JP19900220654
申请日期
1990.08.20
申请人
MITSUBISHI ELECTRIC CORP
发明人
SATO KIMITOSHI
分类号
G01P15/12;H01L29/84;H01L41/08
主分类号
G01P15/12
代理机构
代理人
主权项
地址
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