发明名称 LOESEMITTEL ZUM ENTFERNEN VON PHOTORESISTS.
摘要 Stripper for removing photoresists consists of (a) 10-100 (wt.)% water-soluble amine(s) of formula (I) and 0-90% water-soluble propylene glycol deriv(s). of formula (II); R1-4 are H or alkyl; n and m are 0-2, o is 1-3; R5-6 are H, alkyl or -CO-alkyl; p is 1-3. Pref. the stripper contains isopropanolamine (IA) or N-(2-aminoethyl)-ethanolamine (IB) and di- or tri-propylene glycol methyl ether. The amts. are 10-90, esp. 20-70% (I) and 10-90 esp. 30-80% (II). The components have b.pts. of min. 160 deg.C or min. 80 deg.C.
申请公布号 DE3683982(D1) 申请公布日期 1992.04.02
申请号 DE19863683982 申请日期 1986.10.13
申请人 HOECHST AG, 6230 FRANKFURT, DE 发明人 MERREM, DR., HANS-JOACHIM, W-6104 SEEHEIM-JUGENHEIM, DE;SCHMITT, DR., AXEL, W-6229 WALLUF 2, DE
分类号 G03C11/00;G03F7/00;G03F7/26;G03F7/42;H01L21/027;H01L21/30;(IPC1-7):G03F7/26 主分类号 G03C11/00
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