| 摘要 |
PURPOSE:To improve the life of laser medium gas, by sending new maser medium gas in a laser chamber, from one side, while the pressure inside the laser chamber is kept higher than or equal to the atmospheric pressure, and discharging the gas in the chamber, from the other side. CONSTITUTION:When deteriorated laser medium gas is eliminated from a laser chamber 1, the gas pressure in the laser chamber is usually higher than the atmospheric pressure, so that the following process is performed; firstly, a closing valve 9d and a pressure adjusting valve 14 of a vacuum pump 2a are opened; laser medium gas in a laser chamber 1 is sucked until the vicinity of atmospheric pressure, via a dust filter 3a and a halogen filter 4a, and processed by a gass processing equipment 20. After that, from gas cylinder 11a or 11b which is filled with gas at a pressure higher than the atmospheric pressure, fresh laser medium gas or a part of gas constituting the laser medium gas is sent into the laser chamber 1, via a pressure adjusting valve 8a or 8b, a cross valve 10, a dust filter 3b, a check valve 5a, and a flowmeter 6. The gas corresponding to the amount of sent-in gas is sucked by a vacuum pump 2, and the sucked gas is processed in the gas processing equipment 20. |
