| 摘要 |
<p>Conventionally, electrostrictive effect elements have been obtained as follows. A laminated body in which every other internal electrodes are connected alternately with one of two external electrodes which are formed on opposed faces of the body, is set in a plating bath. Metal ions in the bath are deposited on the internal electrodes. After insulating films are formed, the insulating material only on the deposited metals are removed until the deposited metals are exposed, and the laminated body is cut. However, there are the problems, for example, the electrical conduction is not attained because of the oxidation of the deposited metals when the element is left at a high temperature. The solutions of the problems are found in this invention. Electrostrictive effect layers and internal electrodes are laminated alternately. The end faces of the every other internal electrodes are exposed on the opposed side faces respectively. Temporary external electrodes are formed on the exposed end faces of the internal electrodes. Metallic protrusions are formed on the end faces of the exposed internal electrodes by the electric plating using the temporary external electrodes as cathodes. Then, by mechanical machining or the like, the parts between the metallic protrusions (the parts being not plated) are removed to form recessed parts. Thereafter, insulating films are formed in the recessed parts. Then, by removing the insulating films through polishing to the depth until the metallic protruding parts are eliminated, the every other internal electrodes are made to be exposed or the metallic protruding parts are made to be exposed. In those places, external electrodes are formed, and the every other internal electrodes can be connected to the external electrodes. According to this invention, since the interfacial distances between the end parts of the internal electrodes having different potentials can be increased substantially, electrostrictive elements of high insulation reliability can be realized.</p> |
