发明名称 DISTORTION SENSOR
摘要 A distortion sensor for detecting distortion by utilizing a correlation with the electric resistance of a non-single-crystal semiconductor containing silicon. The distortion sensor of the invention is composed of a non-single-crystal semiconductor, including silicon, whose activation energy of dark conductivity is smaller than 15meV. The distortion sensor of the invention can be used for measuring distortion even under the conditions of a relatively great magnetic field.
申请公布号 WO9205585(A1) 申请公布日期 1992.04.02
申请号 WO1988JP00320 申请日期 1988.03.30
申请人 TAWADA, YOSHIHISA;YAMAGUCHI, MINORI;HOSOKAWA, YOICHI;ZENKI, TOMOYOSHI 发明人 TAWADA, YOSHIHISA;YAMAGUCHI, MINORI;HOSOKAWA, YOICHI;ZENKI, TOMOYOSHI
分类号 H01L29/84;G01B7/16;G01L1/22 主分类号 H01L29/84
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