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经营范围
发明名称
HEAT TREATMENT FURNACE FOR SUBSTRATE
摘要
申请公布号
JPH04101419(A)
申请公布日期
1992.04.02
申请号
JP19900219496
申请日期
1990.08.20
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
MURAOKA YUSUKE
分类号
H05B3/66;H01L21/205;H01L21/22;H01L21/31
主分类号
H05B3/66
代理机构
代理人
主权项
地址
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