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发明名称
DEVICE AND METHOD FOR TREATING SEMICONDUCTOR
摘要
申请公布号
JPH04100223(A)
申请公布日期
1992.04.02
申请号
JP19900217842
申请日期
1990.08.18
申请人
FUJITSU LTD
发明人
OKUNO MASAKI;SATO YASUHISA
分类号
H01L21/302;H01L21/205;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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