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发明名称
PLASMA PROCESSING METHOD
摘要
申请公布号
EP0474244(A3)
申请公布日期
1992.04.01
申请号
EP19910115085
申请日期
1991.09.06
申请人
TOKYO ELECTRON LIMITED
发明人
FUKASAWA YOSHIO;MOMOSE KENJI
分类号
H01L21/302;H01J37/32;H01L21/205;H01L21/3065;(IPC1-7):H01J37/32
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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