METHOD FOR CORRECTING PROXIMITY EFFECTS IN ELECTRON BEAM LITHOGRAPHY
摘要
申请公布号
EP0475033(A3)
申请公布日期
1992.04.01
申请号
EP19910112382
申请日期
1991.07.24
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
ASHTON, CHRISTOPHER JAMES;GERBER, PORTER DEAN;KERN, DIETER PAUL;MOLZEN JR., WALTER WILLIAM;RISHTON, STEPHEN ANTHONY;ROSENFIELD, MICHAEL GERALD;VISWANATHAN, RAMAN GOBICHETTIPALAYAM
