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发明名称
METHOD FOR COATING WITH BORON NITRIDE FILM
摘要
申请公布号
JPH0499260(A)
申请公布日期
1992.03.31
申请号
JP19900211476
申请日期
1990.08.13
申请人
SUMITOMO ELECTRIC IND LTD
发明人
ODA KAZUHIKO;NAKAYAMA AKIRA;KAWAI HIROSHI;FUJITA NOBUHIKO
分类号
C23C14/02;C23C14/06
主分类号
C23C14/02
代理机构
代理人
主权项
地址
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