DISPLACEMENT MEASURING METHOD AND APPARATUS USING DIFFRACTION GRATING,申请号JP19900076161-传众专利搜索

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发明名称	DISPLACEMENT MEASURING METHOD AND APPARATUS USING DIFFRACTION GRATING
摘要
申请公布号	JPH0499914(A)	申请公布日期	1992.03.31
申请号	JP19900076161	申请日期	1990.03.26
申请人	SUMITOMO HEAVY IND LTD	发明人	MIYATAKE TSUTOMU
分类号	G01D5/38;G01B11/00;G03F9/00	主分类号	G01D5/38
代理机构		代理人
主权项
地址

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