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发明名称
ORGANOMETALLIC VAPOR GROWTH APPARATUS
摘要
申请公布号
JPH0499312(A)
申请公布日期
1992.03.31
申请号
JP19900217334
申请日期
1990.08.17
申请人
MITSUBISHI ELECTRIC CORP
发明人
MURAKAMI TAKASHI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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