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发明名称
KISOHANNOSOCHI
摘要
申请公布号
JPS5176976(A)
申请公布日期
1976.07.03
申请号
JP19740148566
申请日期
1974.12.27
申请人
TOKYO SHIBAURA ELECTRIC CO LTD
发明人
YONEZAWA TOSHIO;KITANE SHOICHI;YAMAMOTO SHINICHI
分类号
C23C16/44;C23C16/448;H01L21/205;H01L21/22;H01L21/31;H01L21/314;H01L21/385
主分类号
C23C16/44
代理机构
代理人
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