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发明名称
FORMATION OF THIN FILM AND MANUFACTURE OF SUPERCONDUCTING DEVICE USING SAME
摘要
申请公布号
JPH0499078(A)
申请公布日期
1992.03.31
申请号
JP19900207893
申请日期
1990.08.06
申请人
KOMATSU LTD
发明人
AOYAMA IKUHITO
分类号
C30B29/22;H01L39/24
主分类号
C30B29/22
代理机构
代理人
主权项
地址
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