SEMICONDUCTOR GROWING EQUIPMENT,申请号JP19900207870-传众专利搜索

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发明名称	SEMICONDUCTOR GROWING EQUIPMENT
摘要
申请公布号	JPH0499019(A)	申请公布日期	1992.03.31
申请号	JP19900207870	申请日期	1990.08.06
申请人	NEC CORP	发明人	OSHITA YOSHIO
分类号	C23C16/24;C23C16/52;H01L21/205	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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