| 摘要 |
PURPOSE:To decrease the sticking of foreign matter by static electricity to the pellicle and to prevent the occurrence of pattern defects easily remove this foreign matter even when the foreign matter sticks to the pellicle by providing an org. conductive material on the pellicle surface. CONSTITUTION:The pellicle 13 is a transparent thin film formed of nitrocellulose and is fixed to a photomask 11 via a pellicle frame 12 consisting of an aluminum alloy, etc. Since the nitrocellulose is an insulating material, static electricity is liable to be generated therein. The org. conductive layer 14 consisting of polyacetylene, etc., is, thereupon, formed on the pellicle film 13. The charge of the static electricity is substantially obviated in this way and the foreign matter attracted on the pellicle is decreased. The occurrence of the pattern defects is thus prevented. In addition, even if the foreign matter sticks to the pellicle, the org. conductive layer 14 is provided and, therefore, the foreign matter sticking to the pellicle is easily removed by blowing nitrogen, etc., thereto. |
