| 摘要 |
PURPOSE:To stabilize the operating condition of an optical device by disposing a temperature sensor between an optical device and a cooling device. CONSTITUTION:A slit 18 is formed through a spacer 14 from top to bottom and the bottom surface of an optical deice 16 is exposed. A temperature sensor 20 is disposed in the slit 18 in contact with the side of the optical device 16. Since the temperature sensor 20 is placed between the optical device 16 and a Peltier device 12, it is less affected by changes in the temperature of the environment in which the optical device 16 is being used and detects only the temperature of the optical device 16 with great accuracy. According to these detection values, it is possible to control the Peltier device 12 through a tempera ture control circuit 22 in order to maintain the optical device 16 at a constant temperature and reduce changes in detection performance with being little affected by the surrounding environment. |
