| 摘要 |
PURPOSE:To ensure good peelability, cleanliness, and evenness for a large size substrate by installing ozone jetting pipes having a plurality of blowholes for jetting ozone in the direction perpendicular to the substrate conveying direction and in the direction horizontal to the substrate surface. CONSTITUTION:After ozone is supplied from ozone jetting pipe laid in parallel to a conveyor belt 1 in the direction perpendicular to the conveying direction and in the direction parallel to the surface of a substrate 4, ozone is exhausted through both the exhaust chambers 11 and exhaust pipes 10 installed on the opposite side of belt 1 from pipes 9. Further, at the center of the apparatus, ozone pipe 9 and chamber 11 at the left-hand side of the apparatus are installed opposite to those at the right side thereof from the belt. Furthermore, while a substrate 4 is mounted on a conveyor belt 1 and moved in the horizontal direction, by means of a halogen lamp 5, low pressure mercury lamp 6, and ozone jetting pipes 9 infrared and ultraviolet rays are projected and ozone is jetted to the substrate 4, respectively. With this, the resist on a large area substrate can be removed at low temperature and evenly without contaminating the surface of the substrate. |
