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发明名称
MANUFACTURE OF GATE ARRAY TYPE LSI
摘要
申请公布号
JPH0496368(A)
申请公布日期
1992.03.27
申请号
JP19900214015
申请日期
1990.08.13
申请人
KAWASAKI STEEL CORP
发明人
YAMAMOTO TAKAHIRO;KONDOU HISASHI
分类号
H01L27/118;H01L21/82
主分类号
H01L27/118
代理机构
代理人
主权项
地址
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