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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPH0496327(A)
申请公布日期
1992.03.27
申请号
JP19900214681
申请日期
1990.08.14
申请人
KAWASAKI STEEL CORP
发明人
KINOSHITA OSAMU
分类号
C23C14/12;C23F1/00;C23F1/12;C23F4/00;H01L21/30;H01L21/302;H01L21/3065
主分类号
C23C14/12
代理机构
代理人
主权项
地址
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