METHOD OF REMOVING RESIST ON PERIPHERY OF SUBSTRATE,申请号JP19900214078-传众专利搜索

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发明名称	METHOD OF REMOVING RESIST ON PERIPHERY OF SUBSTRATE
摘要
申请公布号	JPH0496319(A)	申请公布日期	1992.03.27
申请号	JP19900214078	申请日期	1990.08.13
申请人	TOKYO ELECTRON LTD;TOUKIYOU EREKUTORON KIYUUSHIYUU KK	发明人	NINOMIYA KATSUSHIGE;MURAKAMI MASAAKI
分类号	H01L21/30;H01L21/027	主分类号	H01L21/30
代理机构		代理人
主权项
地址

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