| 摘要 |
<p>PURPOSE:To obtain the high-grade color filter having improved color purity and spectral transmittance by providing a stage for washing the surface of color filters and removing the residues of photosensitive colored resins produced on a substrate and colored resin layer. CONSTITUTION:The photosensitive colored resin film 2 of the 1st color is formed on the substrate 1. After this film is prebacked and dried, the resin film is exposed by UV light using a photomask 3. The exposed parts formed by this exposing are photoset parts 2a insoluble in a developer. The unexposed parts are dissolved away by the developer and thereafter, the substrate is subjected to a rinsing treatment. The photosensitive resin is wiped away under, for example, tap water, to wash the substrate. The substrate formed with the color filters from which the residues are removed by the wiping away is pulled up in warm water and is dried by a drier, by which the patterns of the 1st color are obtd. The 2nd color and the 3rd color are thereafter formed in the same manner. The color filters which are free from color mixing are obtd. by providing a protective layer (passivation) 7.</p> |
