| 摘要 |
PURPOSE:To adjust alignment with high precision by comparing the cross-sectional form of light with a reference pattern, obtaining the positional deviation of a mirror and outputting an alignment command in accordance with the positional deviation to a posture adjusting mechanism. CONSTITUTION:A pattern recognition part 54 performs the recognition of pattern between the reference pattern for alignment stored in a reference pattern memory 52 and a pattern for alignment stored in an image memory 53 and obtains the error of alignment. Then, a master control part 51 transmits the position in a Z direction and the theta direction of a concave mirror 2 to a driving circuit 58 through an output part 57 as the alignment command S. Then, the position in the Z direction and the theta direction of a convex mirror 2 are adjusted, and the concave mirror 1 and the convex mirror 2 are aligned. Thus, the alignment is adjusted with high precision. |
