| 摘要 |
PURPOSE:To make possible the detection of angular velocity input of high precision by arranging a plurality of discharge openings of gas supply on a detection element at an equally divided position on the shaft center of an electrode holder. CONSTITUTION:On a sensor a plurality of electrodes 6(6a-6d) are embedded on an electrode holder 5 in a casing 1 and gas is supplied by a gas pump 4 through discharge openings 4b, 5e and a nozzle 8 to at least a pair of detection elements 7(7a,7b) provided between the electrodes 6 respectively. At this time, a discharge opening 4b is provided at an equally divided position on the shaft center A of the pump 4, another discharge opening 5b is drilled on the holder 5 corresponding thereto and a nozzle opening 8 is provided on a hollow cylindrical part 1a provided on the holder 5. And compressed gas is supplied by an electrostriction oscillatory pump 4 and its angular velocity is detected with the measurement of voltage difference between the elements 7 corresponding to the presence of angular velocity application for the casing 1. As the result, the eccentricity of a gas flow is prevented to stabilize so as to perform the detection of high precision. |
