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发明名称
VERFAHREN ZUM PLASMAAETZEN
摘要
申请公布号
DE4130391(A1)
申请公布日期
1992.03.26
申请号
DE19914130391
申请日期
1991.09.12
申请人
MITSUBISHI DENKI K.K., TOKIO/TOKYO, JP
发明人
SHIRAKAWA, KENJI;SEKIYA, HIDENORI, FUKUOKA, JP
分类号
H01L21/302;H01L21/3065;H01L21/3213
主分类号
H01L21/302
代理机构
代理人
主权项
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