| 摘要 |
PURPOSE:To prevent short-circuit and reduce the production cost by forming a compound thin film on a patterned metal electrode, laminating a transparent conductive film on the compound thin film and irradiating laser beams whose output intensity distribution in the beam width direction is asymmetric. CONSTITUTION:An Mo film is formed on a glass substrate 1 by sputtering method and is patterned by laser scribing method so as to form strip-shaped metal electrodes 21, 22, 23.... A p-type CuInSe2, film and an n-type CdS film 40 are formed on the metal electrodes by the sputtering method and a transparent conductive film 50 made of ZnO layer is laminated by the sputtering method on the films 30 and 40 without patterning the layers. For the separation and electrical connection of the unit cells, laser beams which are asymmetric through a slit from the center and whose intensity is within the range of a-b-c-d are irradiated among the Nd:YAG laser beams. At one irradiated area, low resistance junctions 61, 62... are formed and are electrically connected with the metal electrodes 22, 23... of unit cells adjacent to transparent electrodes 51, 52, 53..., and at the other area, the adjacent transparent electrodes of the unit cell are electrically insulated. |
