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经营范围
发明名称
SPIN COATER
摘要
申请公布号
JPH0494116(A)
申请公布日期
1992.03.26
申请号
JP19900210424
申请日期
1990.08.10
申请人
EBARA CORP
发明人
KONDO FUMIO
分类号
G03F7/16;B05C11/08;H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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